Time

Presenter

Topic

9:00-9:30

Registration

9:30-9:50

김영선 사장 (ASML Country Manager – Korea&China)

오프닝 및 환영사

9:50-10:30

Christophe Fouquet (ASML-EVP Applications)

Keynote Speech : ASML Holistic Lithography

10:30-11:00

Dr.Rich Wise (LAM)

Invited Talk (Advanced Patterning Technologies to Enable Lithography Scaling)

11:30-12:00

윤병선 책임 (SK 하이닉스)

OPC Challenge

12:00-12:30

김병국 수석 (삼성전자)

EUV inspection

12:30-13:30

점심

13:30-14:00

김동주 상무 (ASML)

EUV installation

14:00-14:20

Students

Techtalk 논문 발표 (석/박사 부문)

14:20-14:40

14:40-15:00

15:30-16:00

Young Professors

Techtalk 논문 발표 (Young Professor 부문)

16:00-16:30

16:30-17:00

17:00-17:30

시상식 및 클로징